Korea Polytechnic University Gwangju Campus
Application case
Business Name : Educational Training Equipment for the Newly Established Semiconductor System Control Department (Two Types, Including Semiconductor Process Training Simulators)
Project Duration : August 31, 2023 ~ December 29, 2023
Perfect Link Between Industry and Education, A New Leap Forward for Future Semiconductor Talent Development!
Innovative solutions that meet the diverse needs of educational institutions and industries!
Korea Polytechnic University Gwangju Campus VR Lab
This project, carried out in collaboration with Korea Polytechnic University Gwangju Campus, aims to address the increasing need for enhancing the competitiveness of the semiconductor industry amidst shifting industrial paradigms and market changes. It focuses on establishing next-generation, industry-specific equipment and securing hardware and software resources.
The initiative supports repeated mastery of semiconductor process equipment maintenance procedures and enhances safety response capabilities through virtual reality (VR). Additionally, it is based on systematic planning procedures utilized in NCS and industrial safety education scenarios, ensuring high educational effectiveness and immersive engagement.
Essential Process for Maintaining Semiconductor Quality
Cleaning Process
The cleaning process involves removing impurities from the wafer surface using chemical treatments and physical methods such as gas application. As a critical stage in semiconductor manufacturing, cleaning is one of the key processes that determine the final quality of the semiconductor. By effectively eliminating impurities on the wafer surface, it ensures the quality of subsequent processes and contributes to optimizing semiconductor performance. Repeated cleaning operations play a vital role in maintaining the quality and reliability of semiconductor processes.
Scenario Configuration
Contents 01.
Operation of Semiconductor Plasma Cleaning Process Equipment
Trainees practice the initial equipment setup, including assembling the chamber ceramics and connecting pneumatic tubes. They also learn magazine cleaning procedures, as well as pump and generator replacement methods.
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Equipment and Process Description
| QUIZ
| Chamber Ceramic Assembly
|
 |  |  |
Program Verification and Initialization
| Leak and Discharge Test | Magazine Placement
|
 |  |  |
Cleaning Operation
| Maintenance - Pump Replacement
| Maintenance - RF Generator Replacement
|
Contents 02.
Operation of Semiconductor Inspection Process Equipment
Trainees gain knowledge in probe card inspection setup, probe tip fastening, rotary pump oil replacement, compressor oil refilling, and moisture removal procedures.
 |  |  |
| Power ON | Operating Preparation | Probe Tip Contact |
 |  |  |
| Semiconductor Inspection Execution | Maintenance - Rotary Pump Oil Replacement
| Maintenance - Compressor Oil Refill and Moisture Removal |
Contents 03.
Operation of Semiconductor Wafer Pattern Measurement Equipment
Trainees learn the initial operation of the equipment and the use of its programs.
 |  |  |
| Power ON | Operating Preparation
| Pattern Shape Measuring Equipment Operation |
 |  |  |
| Pattern Shape Measurement | Post-Measurement Operation | Final Steps |
Semiconductor processing equipment operation process
Wafer manufacturing: Cut silicon ingots into round wafers.
Oxidation: Forming a silicon oxide film on the wafer surface
Photo: Engraving a semiconductor circuit on a wafer using light
Etching: Removal of the remaining portion (oxide film) excluding the circuit pattern
Deposition, ion implantation: .After making a thin film, ion implantation to have electrical properties
Metal wiring: Connect the electric path (metal wire) according to the circuit pattern
Test (EDS): Inspects each chip (die) on the wafer to eliminate defective products
Packaging: Cut the chips on the wafer into individual pieces and apply a protective film to complete the semiconductor
Experience Equipment
An all-in-one VR training device that allows education anywhere without limitations of location, such as between lecture rooms or indoors and outdoors. The device is equipped with a 43-inch touchscreen for easy operation.
 |  |
| VR Station XO | Meta Quest3 |
Korea Polytechnic University Gwangju Campus
Application case
Business Name : Educational Training Equipment for the Newly Established Semiconductor System Control Department (Two Types, Including Semiconductor Process Training Simulators)
Project Duration : August 31, 2023 ~ December 29, 2023
Perfect Link Between Industry and Education, A New Leap Forward for Future Semiconductor Talent Development!
Innovative solutions that meet the diverse needs of educational institutions and industries!
This project, carried out in collaboration with Korea Polytechnic University Gwangju Campus, aims to address the increasing need for enhancing the competitiveness of the semiconductor industry amidst shifting industrial paradigms and market changes. It focuses on establishing next-generation, industry-specific equipment and securing hardware and software resources.
The initiative supports repeated mastery of semiconductor process equipment maintenance procedures and enhances safety response capabilities through virtual reality (VR). Additionally, it is based on systematic planning procedures utilized in NCS and industrial safety education scenarios, ensuring high educational effectiveness and immersive engagement.
Essential Process for Maintaining Semiconductor Quality
Cleaning Process
The cleaning process involves removing impurities from the wafer surface using chemical treatments and physical methods such as gas application. As a critical stage in semiconductor manufacturing, cleaning is one of the key processes that determine the final quality of the semiconductor. By effectively eliminating impurities on the wafer surface, it ensures the quality of subsequent processes and contributes to optimizing semiconductor performance. Repeated cleaning operations play a vital role in maintaining the quality and reliability of semiconductor processes.
Contents 01.
Operation of Semiconductor Plasma Cleaning Process Equipment
Trainees practice the initial equipment setup, including assembling the chamber ceramics and connecting pneumatic tubes. They also learn magazine cleaning procedures, as well as pump and generator replacement methods.
Contents 02.
Operation of Semiconductor Inspection Process Equipment
Trainees gain knowledge in probe card inspection setup, probe tip fastening, rotary pump oil replacement, compressor oil refilling, and moisture removal procedures.
Contents 03.
Operation of Semiconductor Wafer Pattern Measurement Equipment
Trainees learn the initial operation of the equipment and the use of its programs.
Wafer manufacturing: Cut silicon ingots into round wafers.
Oxidation: Forming a silicon oxide film on the wafer surface
Photo: Engraving a semiconductor circuit on a wafer using light
Etching: Removal of the remaining portion (oxide film) excluding the circuit pattern
Deposition, ion implantation: .After making a thin film, ion implantation to have electrical properties
Metal wiring: Connect the electric path (metal wire) according to the circuit pattern
Test (EDS): Inspects each chip (die) on the wafer to eliminate defective products
Packaging: Cut the chips on the wafer into individual pieces and apply a protective film to complete the semiconductor
An all-in-one VR training device that allows education anywhere without limitations of location, such as between lecture rooms or indoors and outdoors. The device is equipped with a 43-inch touchscreen for easy operation.