Development of VR Content for Semiconductor Process Practice at Gangneung-Wonju National University
Application Case
Business Name : Semiconductor Process Practice VR Content Development Service
Project Duration : February 7, 2024 ~ February 28, 2024
Creating opportunities for semiconductor talent development and capability enhancement through the entire process of XR-based semiconductor photolithography, ion, and deposition processes!
Gangneung-Wonju National University Advanced Semiconductor Talent Development Bootcamp Program
This project, conducted in collaboration with the Gangneung-Wonju National University Industry-Academic Cooperation Foundation, provides educational content based on XR technology for photolithography, deposition & ion processes, including the RF Sputter process and Lithography process. Using actual equipment from the processes, learners can repeatedly train and familiarize themselves with the process procedures, enhancing their skills as semiconductor professionals.
Two Types of Semiconductor Process Content
1. Content Composition
Learners experience the training procedures of the RF Sputter process, which is part of the deposition & ion processes, and the Lithography process, which is part of the photolithography processes, exactly as they are in real-world processes. Through this, learners familiarize themselves with the RF Sputter and Lithography process steps, and become comfortable with the equipment used in these processes, enhancing their practical skills.
Content Title
| Process
| Used Equipment | Content
|
| RF Sputter Process | Ion & Deposition Process
| RF Sputter | The RF Sputter process, based on the principle of RF sputtering and the replacement of the Sputter Target, allows the deposition of various thin films. Learn the process of plasma gold thin film deposition using RF Sputter equipment.
|
Lithography Process
| Photolithography Process
| Spin Coater Hot Plate(Wet Station) Mask Aligner Microscope | Learn about the photolithography process, where light is used to form patterns on a wafer. This includes the procedures of HMDS Coating, PR Coating, Baking, Mask Align & Exposure, Development, and Inspection. |
2. 3D Modeling of Semiconductor Equipment
The semiconductor process equipment used in the content is modeled to replicate the actual equipment used in real processes, providing it at a scale identical to the real size. This enables the creation of high-resolution, lifelike models that maximize the immersive experience for learners.
Content Title
| Real Photograph | 3D Modeling
|
RF Sputter
|  |  |
| Lithography |  |  |
Semiconductor processing equipment operation process
Wafer manufacturing: Cut silicon ingots into round wafers
Oxidation: Forming a silicon oxide film on the wafer surface
Photo: Engraving a semiconductor circuit on a wafer using light
Etching: Removal of the remaining portion (oxide film) excluding the circuit pattern
Deposition, ion implantation: After making a thin film, ion implantation to have electrical properties
Metal wiring: Connect the electric path (metal wire) according to the circuit pattern
Test (EDS): Inspects each chip (die) on the wafer to eliminate defective products
Packaging: Cut the chips on the wafer into individual pieces and apply a protective film to complete the semiconductor
Experience Equipment
An all-in-one VR training device that allows education anywhere without limitations of location, such as between lecture rooms or indoors and outdoors. The device is equipped with a 43-inch touchscreen for easy operation.
 |  |
| VR Station XO | Meta Quest3 |
Development of VR Content for Semiconductor Process Practice at Gangneung-Wonju National University
Application Case
Business Name : Semiconductor Process Practice VR Content Development Service
Project Duration : February 7, 2024 ~ February 28, 2024
Creating opportunities for semiconductor talent development and capability enhancement through the entire process of XR-based semiconductor photolithography, ion, and deposition processes!
This project, conducted in collaboration with the Gangneung-Wonju National University Industry-Academic Cooperation Foundation, provides educational content based on XR technology for photolithography, deposition & ion processes, including the RF Sputter process and Lithography process. Using actual equipment from the processes, learners can repeatedly train and familiarize themselves with the process procedures, enhancing their skills as semiconductor professionals.
1. Content Composition
Learners experience the training procedures of the RF Sputter process, which is part of the deposition & ion processes, and the Lithography process, which is part of the photolithography processes, exactly as they are in real-world processes. Through this, learners familiarize themselves with the RF Sputter and Lithography process steps, and become comfortable with the equipment used in these processes, enhancing their practical skills.
Hot Plate(Wet Station)
Mask Aligner
Microscope
Learn about the photolithography process, where light is used to form patterns on a wafer. This includes the procedures of HMDS Coating, PR Coating, Baking, Mask Align & Exposure, Development, and Inspection.
2. 3D Modeling of Semiconductor Equipment
The semiconductor process equipment used in the content is modeled to replicate the actual equipment used in real processes, providing it at a scale identical to the real size. This enables the creation of high-resolution, lifelike models that maximize the immersive experience for learners.
Wafer manufacturing: Cut silicon ingots into round wafers
Oxidation: Forming a silicon oxide film on the wafer surface
Photo: Engraving a semiconductor circuit on a wafer using light
Etching: Removal of the remaining portion (oxide film) excluding the circuit pattern
Deposition, ion implantation: After making a thin film, ion implantation to have electrical properties
Metal wiring: Connect the electric path (metal wire) according to the circuit pattern
Test (EDS): Inspects each chip (die) on the wafer to eliminate defective products
Packaging: Cut the chips on the wafer into individual pieces and apply a protective film to complete the semiconductor
An all-in-one VR training device that allows education anywhere without limitations of location, such as between lecture rooms or indoors and outdoors. The device is equipped with a 43-inch touchscreen for easy operation.