Korea Polytechnics Gumi Campus : Samwoo Immersion-Portfolio

Korea Polytechnics Gumi Campus

Korea Polytechnics Gumi Campus

Purchase of Semiconductor Process Equipment Training VR Content

Application case

Project Name: Dream Workshop XR Immersive Content Purchase

Project Period: November 15, 2024 – December 15, 2024

Korea Polytechnics Gumi Campus, Purchase of Semiconductor Process Equipment Training VR Content

Samwoo Immersion has newly established the Dream Workshop at Korea Polytechnic University Gumi Campus, providing virtual reality (XR)-based safety and vocational experience content. This space is designed to maximize learning effectiveness and enhance practical on-site response skills through immersive experiences of various safety scenarios and vocational training. Equipped with state-of-the-art XR technology, it offers a creative and innovative educational environment for youth and local residents, supporting diverse hands-on activities and technical learning. This space serves as a model for the community and campus to grow together.

7 Types of Industrial Semiconductor Equipment Operation and Maintenance Content

1. Content Composition

We provide an educational process for the operation and maintenance of wafer manufacturing, photolithography, etching, ion implantation and deposition, and cleaning processes, which are part of the eight major semiconductor processes. The training also covers the use of clean rooms and responding to safety incidents. Through this, trainees enhance their familiarity with semiconductor equipment and improve their practical skills.

Content Title	Processes	Equipment	Content Description
Wafer Manufacturing Process	Wafer Manufacturing Process	Edge Grinder	Learning the wafer manufacturing process through quizzes.
Photolithography Process	Lithography Process	Mask Aligner	Learning the photolithography process procedures using a spin coater, hot plate, aligner, and microscope.
Etching Process	Etching Process	PCMC (Plasma Complex Machining Center)	Familiarizing with the operation methods of the plasma processing equipment and learning the coating process using cathode plasma and the etching process using anode plasma.
Deposition & Ion Process	FURNACE SYSTEM - Tube Change -	SP CVD Furnace	Learning the maintenance procedures for regular PM of the Plasma Sputtering thin film deposition system, including metal target change and chamber cleaning.
Cleaning Process	Plasma Cleaning Equipment	Plasma Cleaning Equipment	Learning the operating principles and regular maintenance procedures for semiconductor cleaning process equipment using plasma.
EDS Process	Semiconductor Tester	Semiconductor Tester	Learning the semiconductor inspection process using a semiconductor tester and the procedures for regular maintenance.
Others	Cleanroom Usage and Response to Safety Incidents	-	Learning the procedures for wearing personal protective equipment (PPE), managing chemical safety, and the steps for disposal of used chemicals and reagents.

2. Semiconductor Equipment 3D Modeling

The semiconductor process equipment used in the content is based on industrial equipment used in actual semiconductor mass production, providing 3D models scaled to the same size as the production models.

Content Title	Real Photo	3D Modeling
Photolithography Process
Etching Process
FURNACE SYSTEM - Tube Change -
Plasma Cleaning Equipment
Semiconductor Tester

DreamWorkshop?

DreamWorkshop is a facility operated by Korea Polytechnic University Iksan Campus, offering free technical education and hands-on learning experiences to the public year-round, utilizing the university's facilities and equipment.

Operating Institution: Korea Polytechnic University Gumi Campus DreamWorkshop
Operating Hours: Open year-round based on demand (Main hours: Weekdays 9 AM – 9 PM, Saturdays 9 AM – 5 PM, Closed on Sundays and public holidays)
Target Audience: Available to all citizens, including employees of companies, general public, non-insured individuals, active-duty soldiers and those about to discharge from the military, trainees from private vocational training institutions, and students
Supported Areas: Realistic experience booths, technical education through certification support, customized technical training, support for manufacturing startups, and hands-on learning opportunities

IMXR Semiconductor 8 Major Processes Tour MR Content

Go to IMXR Semiconductor Job Training VR Content (8 semiconductor processes : EDS process, photo process & cleaning process) >

Kangwon National University Semiconductor Specialization University Business Group Semiconductor Job Training VR Content Introduction Korea Polytechnics Daegu Campus

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